학술논문

Low-temperature crystallization of hydrogenated amorphous silicon films in contact with evaporated aluminum electrodes.
Document Type
Article
Source
Journal of Applied Physics. 8/1/1987, Vol. 62 Issue 3, p837. 4p.
Subject
*CRYSTALLIZATION
*AMORPHOUS semiconductors
*THIN films
Language
ISSN
0021-8979
Abstract
Studies the low-temperature crystallization of hydrogenated amorphous silicon films in contact with evaporated aluminum electrodes. Potential applications of hydrogenated amorphous silicon; Details on the experimental procedure; Discussion on the experimental results.