학술논문

A BRIEF OVERVIEW OF SCANNING TRANSMISSION ELECTRON MICROSCOPY IN A SCANNING ELECTRON MICROSCOPE.
Document Type
Article
Author
Source
Electronic Device Failure Analysis. Nov2021, Vol. 23 Issue 4, p18-26. 7p.
Subject
*SCANNING electron microscopy
*SCANNING electron microscopes
*PHOTOMULTIPLIERS
*SCANNING transmission electron microscopy
*PHYSICS conferences
Language
ISSN
1537-0755
Abstract
The article explores scanning electron microscopes (SEMs) and the transmission electron detectors used therein are widely available. Both are generally easy to use, making the collection of imaging and diffraction techniques referred to as scanning transmission electron microscopy in a scanning electron microscope (STEM-in-SEM) more accessible today than ever before.