학술논문
Interfacial photovoltage microscopy: A new diagnostic for silicon-on-insulator materials.
Document Type
Article
Author
Source
Subject
*ELECTRIC fields
*SILICON
*MICROSCOPES
*
*
Language
ISSN
0021-8979
Abstract
Presents a study that developed the interfacial photovoltage microscope to nondestructively obtain information about the electric fields near the silicon-insulator interface. Description of simple physical models; Comparison with other photovoltage methods; System overview; Details of the experiment.