학술논문

Influence of the positive ion temperature in cold plasma diagnosis.
Document Type
Article
Source
Applied Physics Letters. 9/4/2006, Vol. 89 Issue 10, p101501. 3p. 2 Graphs.
Subject
*LOW temperature plasmas
*CATIONS
*LANGMUIR probes
*ELECTRON distribution
*CALIBRATION
*CHEMICAL vapor deposition
*PLASMA etching
*EQUIPMENT & supplies
Language
ISSN
0003-6951
Abstract
The influence of the positive ion temperature in cold plasma diagnosis by using Langmuir probes is analyzed. The positive ion zone of the I-V characteristic is used. This zone is distinguished because the charge drained from the plasma is small, diminishing the perturbation due to the measurement process. Nevertheless, it is much affected by the positive ion temperature, thus the traditional methods give inaccurate values for the electron density. Moreover, for an accurate measurement of that current, a good calibration of the instrument used must be ensured. The authors propose the floating potential as the proper parameter to control that calibration. [ABSTRACT FROM AUTHOR]