학술논문

Floating potential and sheath thickness for cylindrical and spherical probes in electronegative plasmas.
Document Type
Article
Source
Journal of Applied Physics. 3/1/2006, Vol. 99 Issue 5, p053303. 6p. 2 Charts, 4 Graphs.
Subject
*LANGMUIR probes
*CYLINDRICAL probabilities
*ELECTRIC currents
*THERMODYNAMIC potentials
*CATIONS
*PHYSICS
Language
ISSN
0021-8979
Abstract
In this paper, the floating potential, for cylindrical and spherical Langmuir probes immersed into an electronegative plasma, is determined by using a radial model described in a previous paper. This floating potential is determined for several probe radius values and ranks of plasma electronegativity, from almost electropositive plasmas to high electronegative plasmas. The thickness of the positive ion sheath is also determined for this kind of probes in electronegative plasmas, as well as the analytical expressions fitting this thickness, showing its dependence on the probe radius and electric potential. [ABSTRACT FROM AUTHOR]