학술논문
Deposition of in-plane textured MgO on amorphous Si[sub 3]N[sub 4] substrates by....
Document Type
Article
Author
Source
Subject
*THIN films
*ION bombardment
*OXIDES
*
*
Language
ISSN
0003-6951
Abstract
Examines the ion beam assisted deposition (IBAD) of magnesium oxide (MgO) thin films on amorphous Si[sub 3]N[sub 4] substrates. Use of MgO as a structural template; Comparison of samples with IBAD of yttria-stabilized-zirconia; Use of transmission electron microscopy and in situ reflection high energy-electron diffraction.