학술논문
Sheath structure in a plane probe inmersed in an electronegative plasma.
Document Type
Article
Source
Subject
*ELECTRONIC probes
*PLASMA gases
*
Language
ISSN
0021-8979
Abstract
Deals with a study which analyzed the sheath zone near a plane probe immersed in electronegative plasma. Hypothesis; Equations; Bohm criterion; Results; Conclusions.