학술논문
The `bottom line' of automated wafer-level tracking.
Document Type
Article
Author
Source
Subject
*SEMICONDUCTOR wafers
*MICROELECTRONICS
*
Language
ISSN
0038-111X
Abstract
Presents information on the advantages of automated individual wafer-level tracking. How the automated individual wafer tracking can eliminate misprocessing and lower material costs; Details on the challenges; Conclusion.