학술논문
Mist Deposited Lead Zirconate Titanate Films.
Document Type
Article
Source
Subject
*FERROELECTRICITY
*THIN films
*LEAD compounds
*PIEZOELECTRIC materials
*CRYSTALLOGRAPHY
*POLARIZATION (Electricity)
*ELECTRIC fields
*DIELECTRICS
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Language
ISSN
0015-0193
Abstract
The liquid source misted chemical deposition (LSMCD) method was employed in the preparation of lead zirconate titanate, Pb(Zr0.52Ti0.48)O3 (PZT) thin films. The desired thickness of the films was adjusted by a number of successive deposition/heating cycles. Typically, a 500-nm-thick film was achieved by running four processing cycles. The PZT films showed good phase purity with a (111)-preferred crystallographic orientation. The capacitance voltage (C-V) and polarization electric field (P-E) hysteresis curves displayed normal ferroelectric behavior of LSMCD-derived films with asymmetric switching. The dielectric and ferroelectric properties were comparable with the properties of thin films prepared by other techniques. [ABSTRACT FROM PUBLISHER]