학술논문
Fabrication of High Aspect Ratio Ferroelectric Microtubes by Vacuum Infiltration using Macroporous Silicon Templates.
Document Type
Article
Source
Subject
*FERROELECTRIC crystals
*LEAD compounds
*CHEMICAL reactions
*PEROVSKITE
*X-ray diffraction
*TRANSMISSION electron microscopy
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Language
ISSN
0002-7820
Abstract
Ordered arrays of high aspect ratio (>10:1) ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) tube structures were fabricated by vacuum infiltration of macroporous silicon (Si) templates. Improved phase purity was achieved when PZT microtubes were pyrolyzed at 300°C and partially released from the Si template to prevent a chemical reaction between the Pb and the Si during subsequent high-temperature crystallization. The free-standing microtubes were crystallized by rapid thermal annealing at 750°C for 1–3 min. Perovskite phase formation was confirmed by X-ray diffraction and transmission electron microscopy methods. Coaxial structures comprised of metallic LaNiO3, PZT, and Pd layers were also processed to enable future electrical characterization of the ferroelectric microtubes. [ABSTRACT FROM AUTHOR]