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Conference
2022 International Symposium on Semiconductor Manufacturing (ISSM) Semiconductor Manufacturing (ISSM), 2022 International Symposium on. :1-4 Dec, 2022
Conference
Chryssikos, Domenikos; Heigl, Martin; Kounoupioti, Evanthia; Neumeier, Karl; Wieland, Robert; Tornow, Marc
2022 IEEE 22nd International Conference on Nanotechnology (NANO) Nanotechnology (NANO), 2022 IEEE 22nd International Conference on. :234-237 Jul, 2022
Book
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:677-689
Conference
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2016 Symposium on. :1-4 May, 2016
Academic Journal
Wieland, Robert; Bonfert, Detlef; Klumpp, Armin; Merkel, Reinhard; Nebrich, Lars; Weber, Josef; Ramm, Peter
In Microelectronic Engineering 2005 82(3):529-533
Aalto, Timo; Airaksinen, Veli-Matti; Albert, Stephan Gerhard; Allegato, Giorgio; Amiotti, Marco; Anttila, Olli; Auersperg, Juergen; Bonucci, Antonio; Bose, Indranil Ronnie; Braun, Tanja; Broas, Mikael; Burggraf, J.; Cameron, Christopher; Candler, Rob N.; Cao, Zhen; Cardoso, André; Chen, Kuo-Shen; Conte, Andrea; Cozma, Adriana; Davis, Cristina E.; Dempwolf, Sophia; Dixit, Pradeep; Dost, Michael; Dragoi, Viorel; Eränen, Simo; Fain, Bruno; Figeys, B.; Fischer, Andreas C.; Flötgen, Christoph; Franssila, Sami; Friedberger, Alois; Fueldner, Marc; Ganchenkova, Maria; Gonzalez, Pilar; Gosálvez, Miguel A.; Grimes, Michael; Haapalinna, Atte; Hagelin, Paul; Hammond, Paul; Henttinen, Kimmo; Henttonen, Vesa; Horsley, David; Hoshi, Takeo; Itoh, Satoshi; Jakobsen, Henrik; Jansen, R.; Jonsson, Kerstin; Kähler, Dirk; Kannojia, Harindra Kumar; Kattelus, Hannu; Kissinger, Gudrun; Knechtel, Roy; Knese, Kathrin; Kolari, Kai; Koskenvuori, Mika; Kuisma, Heikki; Kulkarni, Amit; Laermer, Franz; Landesberger, Christof; Leinenbach, Christina; LeVasseur, Michael K.; Li, Jue; Lin, Yuyuan; Lindner, Paul F.; Lodewijks, K.; Lofink, Fabian; Longoni, Giorgio; Luber, Sebastian Markus; Mahmud-ul-hasan, M.; Mäkinen, Jari; Mäntysalo, Matti; Martin, Devin; Maspero, Federico; Mattila, Toni T.; Mauri, Luca; Merz, Peter; Meyer, Doug; Moraja, Marco; Motooka, Teruaki; Müller, Gerhard; Muralt, Paul; Nieminen, Risto M.; Niklaus, Frank; Oggioni, Laura; Olkkonen, Juuso; Österlund, Elmeri; Ou, Kuang-Shun; Paloheimo, Jari; Pasanen, Toni P.; Paulasto-Kröckel, Mervi; Plach, Thomas; Polizzi, Jean-Philippe; Pressel, Klaus; Putkonen, Matti; Puurunen, Riikka L.; Reinert, Wolfgang; Rizzi, Enea; Rochus, V.; Ross, Glenn; Rottenberg, X.; Sainiemi, Lauri; Savin, Hele; Schenk, Harald; Schikowski, Marc; Schulze, Matthias; Seema, S.; Severi, S.; Skogström, Lasse; Suga, Tadatomo; Sullivan, Scott; Suni, Tommi; Theuss, Horst; Tilli, Markku; Tilmans, H.A.C.; Tittonen, Ilkka; Tofteberg, Hannah; Törmä, Pekka; Tuomikoski, Santeri; Tyholdt, Frode; Uda, Tsuyoshi; Vallin, Örjan; Valzasina, Carlo; Veijola, Timo; Viinikka, Eeva; Vogel, Dietmar; Vogl, Andreas; Vuorinen, Vesa; Westervelde, W.J.; Wicht, Sebastian; Wieland, Robert; Winkler, Bernhard; Yobas, Levent; Zanotti, Luca; Zubel, I.
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:xv-xvii
Conference
2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI. :128-132 May, 2009
Conference
2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) VLSI Technology, Systems and Applications, 2007. VLSI-TSA 2007. International Symposium on. :1-2 Apr, 2007
Academic Journal
Academic Journal
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[AR] Wieland, Robert
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