소장자료
| LDR | 01694cam a2200313 a 4500 | ||
| 001 | 0092043911▲ | ||
| 005 | 20180521063850▲ | ||
| 008 | 120524s2008 njua b 001 0 eng ▲ | ||
| 010 | ▼a2007024692▲ | ||
| 015 | ▼aGBA788215▼2bnb▲ | ||
| 020 | ▼a9780470174470 (cloth)▲ | ||
| 020 | ▼a0470174471 (cloth)▲ | ||
| 035 | ▼a(KERIS)REF000016401826▲ | ||
| 040 | ▼aDLC▼cDLC▼dBAKER▼dBTCTA▼dUKM▼dYDXCP▼dC#P▼dDLC▼d221016▲ | ||
| 050 | 0 | 0 | ▼aQD506▼b.I74 2008▲ |
| 082 | 0 | 0 | ▼a621.381▼221▲ |
| 090 | ▼a621.381▼bI66s▲ | ||
| 100 | 1 | ▼aIrene, Eugene A.▲ | |
| 245 | 1 | 0 | ▼aSurfaces, interfaces, and thin films for microelectronics /▼cEugene A. Irene.▲ |
| 260 | ▼aHoboken, N.J. :▼bWiley-Interscience,▼cc2008.▲ | ||
| 300 | ▼axiii, 515 p. :▼bill. ;▼c25 cm.▲ | ||
| 504 | ▼aIncludes bibliographical references and index.▲ | ||
| 505 | 0 | ▼aIntroduction to surfaces --Structure of surfaces --Thermodynamics of surfaces and interfaces --Surface roughness --Surface electronic states --Other surface probes --Other surface probes --Charged surfaces --Adsorption --Ellipsometry and optical properties of surfaces, interfaces, and films --Films and interfaces --Electronic passivation of semiconductor-dielectric film interfaces --The Si-SiO₂ interface and other MOSFET interfaces.▲ | |
| 520 | ▼aThe practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes Electronic and microelectronic materials are vital to technologies such as semiconductors, integrated circuits, magnetic alloys, insulators, and optical/display materials▲ | ||
| 650 | 0 | ▼aSurface chemistry.▲ | |
| 650 | 0 | ▼aInterfaces (Physical sciences)▲ | |
| 650 | 0 | ▼aThin films.▲ | |
| 650 | 0 | ▼aMicroelectronics▼xMaterials.▲ | |
| 999 | ▼c정영주▲ |
Surfaces, interfaces, and thin films for microelectronics
자료유형
국외단행본
서명/책임사항
Surfaces, interfaces, and thin films for microelectronics / Eugene A. Irene.
개인저자
발행사항
Hoboken, N.J. : Wiley-Interscience , c2008.
형태사항
xiii, 515 p. : ill. ; 25 cm.
서지주기
Includes bibliographical references and index.
내용주기
Introduction to surfaces --Structure of surfaces --Thermodynamics of surfaces and interfaces --Surface roughness --Surface electronic states --Other surface probes --Other surface probes --Charged surfaces --Adsorption --Ellipsometry and optical properties of surfaces, interfaces, and films --Films and interfaces --Electronic passivation of semiconductor-dielectric film interfaces --The Si-SiO₂ interface and other MOSFET interfaces.
요약주기
The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes Electronic and microelectronic materials are vital to technologies such as semiconductors, integrated circuits, magnetic alloys, insulators, and optical/display materials
ISBN
9780470174470 (cloth) 0470174471 (cloth)
청구기호
621.381 I66s
소장정보
예도서예약
서서가에없는책 신고
보보존서고신청
캠캠퍼스대출
우우선정리신청
배자료배달신청
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