소장자료
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035 | ▼a(KERIS)BIB000010533475▲ | ||
037 | ▼bIEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331▲ | ||
040 | ▼a211057▼d221016▲ | ||
082 | 0 | 0 | ▼a621.3815▼221▲ |
090 | ▼a621.3815▼bI22i▲ | ||
210 | 0 | ▼aIEEE trans. semicond. manuf.▲ | |
212 | 0 | ▼aInstitute of Electrical and Electronics Engineers transactions on semiconductor manufacturing▲ | |
222 | 0 | ▼aIEEE transactions on semiconductor manufacturing▲ | |
245 | 0 | 0 | ▼aIEEE transactions on semiconductor manufacturing :▼ba publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.▲ |
246 | 3 | 0 | ▼aTransactions on semiconductor manufacturing▲ |
246 | 3 | 0 | ▼aSemiconductor manufacturing▲ |
260 | ▼aNew York, N.Y. :▼bInstitute of Electrical and Electronics Engineers,▼cc1988-▲ | ||
300 | ▼av. :▼bill. ;▼c28 cm.▲ | ||
310 | ▼aQuarterly▲ | ||
362 | 0 | ▼aVol. 1, no. 1 (Feb. 1988)-▲ | |
500 | ▼aTitle from cover.▲ | ||
530 | ▼aAvailable in microfiche and microfilm.▲ | ||
650 | 0 | ▼aSemiconductors▼xDesign and construction▼xPeriodicals.▲ | |
710 | 2 | ▼aIEEE Components, Hybrids, and Manufacturing Technology Society.▲ | |
710 | 2 | ▼aIEEE Electron Devices Society.▲ | |
710 | 2 | ▼aIEEE Reliability Society.▲ | |
710 | 2 | ▼aIEEE Solid-State Circuits Council.▲ | |
710 | 2 | ▼aInstitute of Electrical and Electronics Engineers.▲ | |
999 | ▼a목록작업▼c목록작업▲ |
IEEE transactions on semiconductor manufacturing :a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council
자료유형
국외연속간행물
서명/책임사항
IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
다양한 서명
Transactions on semiconductor manufacturing
Semiconductor manufacturing
Semiconductor manufacturing
단체저자
발행사항
New York, N.Y. : Institute of Electrical and Electronics Engineers , c1988-
형태사항
v. : ill. ; 28 cm.
간행빈도
Quarterly
권년차사항
Vol. 1, no. 1 (Feb. 1988)-
일반주기
Title from cover.
이용가능한 다른형태자료 주기
Available in microfiche and microfilm.
ISSN
청구기호
621.3815 I22i
축약표제
IEEE trans. semicond. manuf.
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