학술논문
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30~40
Book
In: Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS 2006 - Selected, peer reviewed papers from the 8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) . (Solid State Phenomena, 2008, 134:71-74)
Conference
Garnier, P.; Pernet, B.; Gomez, Y.; Barge, D.; Tavel, B.; Henderson, C.; Levy, D.; Vessa, T.; Larrea, A.S.; Torres, A.
In: ECS Transactions , ECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing. (ECS Transactions, 2007, 11(2):257-264)
Conference
Denais, M.; Parthasarathy, C.; Ribes, G.; Rey-Tauriac, Y.; Revil, N.; Arnaud, F.; Huard, V.; Bidaud, M.; Barge, D.; Tavel, B.; Perrier, F.; Stolk, P.; Vishnubhotla, L.; Bravaix, A.
In: IEEE International Integrated Reliability Workshop Final Report , 2004 IEEE International Integrated Reliability Workshop Final Report. (IEEE International Integrated Reliability Workshop Final Report, 2004, :121-124)
Conference
In: Proceedings - Electrochemical Society , Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - proceedings of the First International Symposium. (Proceedings - Electrochemical Society, 2004, 4:47-59)
Conference
Duriez, B.; Tavel, B.; Ortolland, C.; Bidaud, M.; Barge, D.; Dachs, C.; Rochereau, K.; Stolk, P.; Boeuf, F.; Basso, M.T.; Laplanche, Y.; Wacquant, F.; Morin, P.; Lenoble, D.; Palla, R.; Brut, H.; Roy, D.; Marin, M.; Payet, F.; Cagnat, N.; Difrenza, R.; Denais, M.; Arnaud, F.; Reber, D.; Woo, M.
In: Technical Digest - International Electron Devices Meeting, IEDM , Technical Digest - IEEE International Electron Devices Meeting, 2004 IEDM (50th Annual Meeting). (Technical Digest - International Electron Devices Meeting, IEDM, 2004, :847-850)
Conference
Pain, L.; Jurdit, M.; Laplanche, Y.; Manakli, S.; Palla, R.; Beverina, A.; Faure, R.; Bossy, X.; Leininger, H.; Tourniol, S.; Judong, F.; Brosselin, K.; Gouraud, P.; Henry, D.; Arnaud, F.; Todeschini, J.; Broekaart, M.; De Jonghe, V.; Stolk, P.; Tavel, B.; Bervin, G.; Woo, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Emerging Lithographic Technologies VIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5374(PART 2):590-600)
Conference
Guillaumot, B.; Garros, X.; Rivoire, M.; Skotnicki, T.; Oshima, K.; Chroboczek, J.A.; Truche, R.; Papon, A.M.; Martin, F.; Damlencourt, J.F.; Maitrejean, S.; Leroux, C.; Deleonibus, S.; Lime, F.; Cristoloveanu, S.; Ghibaudo, G.; Tavel, B.; Masson, P.; Autran, J.L.
In: International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings , 2003 8th International Symposium on Plasma- and Process-Induced Damage, P2ID 2003. (International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings, 2003, 2003-January:56-60)
Conference
Tavel, B.; Skotnicki, T.; Pares, G.; Carrière, N.; Rivoire, M.; Leverd, F.; Julien, C.; Torres, J.; Pantel, R.
In: Technical Digest - International Electron Devices Meeting . (Technical Digest - International Electron Devices Meeting, 2001, :825-828)
Conference
Boeuf, F.; Skotnicki, T.; Monfray, S.; Julien, C.; Dutartre, D.; Martins, J.; Mazoyer, P.; Palla, R.; Tavel, B.; Ribot, P.; Sondergard, E.; Sanquer, M.
In: Technical Digest - International Electron Devices Meeting . (Technical Digest - International Electron Devices Meeting, 2001, :637-640)
Academic Journal
Pain, L.; Jurdit, M.; Brun, P.; Laplanche, Y.; Leininger, H.; Tourniol, S.; Faure, R.; Bossy, X.; Palla, R.; Beverina, A.; Judong, F.; Brosselin, K.; Depoyan, L.; Le Friec, Y.; Leverd, F.; Josse, E.; Hinsinger, O.; Henry, D.; Arnaud, F.; Todeschini, J.; Broekaart, M.; De Jonghe, V.; Stolk, P.; Tavel, B.; Woo, M.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , Microprocesses and Nanotechnology. (Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, June 2004, 43(6 B):3755-3761)
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제한된 항목
[AR] Tavel, B.
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