학술논문
'학술논문'
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In Microelectronic Engineering 1 March 2020 224
Conference
Feng, Y.; Xuan, P.; Wu, D.; Yang, B.; Xu, C.; Liu, N.; Izikson, P.; Chen, C.; Verstraeten, B.; Wang, A.; Sanguinetti, G.; Miceli, G.; Boter, J.; Van Der Meijden, V.; Li, H.; Mozooni, B.; You, H.; Yan, X.-Z.; Markov, V.; Chai, Y.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11611)
Conference
Kim, J.-S.; Hwang, J.-H.; Ha, H.-J.; Lancee, R.; Van Der Meijden, V.; Noot, M.; Foltynski, B.; Macht, L.; Grzela, G.; Grouwstra, C.; Byun, J.-M.; Hu, K.-Y.; Jeon, S.-R.; Jang, W.-J.; Son, H.-S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10959)
Conference
Oh, J.; Maeng, K.-S.; Shin, J.-H.; Choi, W.-W.; Won, S.-K.; Grouwstra, C.; El Kodadi, M.; Heil, S.; Van Der Meijden, V.; Hong, J.K.; Kim, S.-J.; Kwon, O.-S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10585)
Conference
Kim, T.-S.; Park, Y.-S.; Kim, Y.-C.; Kim, B.-H.; Lee, J.-H.; Kwak, M.-K.; Choi, S.-W.; Park, J.-S.; Yang, H.-C.; Meixner, P.; Lee, D.-J.; Kwon, O.-S.; Kim, H.-S.; Park, J.-T.; Lee, S.-M.; Grouwstra, C.; Van Der Meijden, V.; El Kodadi, M.; Kim, C.; Guittet, P.-Y.; Nooitgedagt, T.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10585)
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[AR] van der Meijden, V.
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