학술논문
'학술논문'
에서 검색결과 185건 | 목록
1~10
Academic Journal
Davalos, Rafael V.; McGraw, Gregory J.; Wallow, Thomas I.; Morales, Alfredo M.; Krafcik, Karen L.; Fintschenko, Yolanda; Cummings, Eric B.; Simmons, Blake A.
Periodical
Sanchez, Martha I.; Ukraintsev, Vladimir A.; Wallow, Thomas I.; Zhang, Chen; Fumar-Pici, Anita; Chen, Jun; Laenens, Bart; Spence, Christopher A.; Rio, David; van Adrichem, Paul; Dillen, Harm; Wang, Jing; Yang, Peng-Cheng; Gillijns, Werner; Jaenen, Patrick; van Roey, Frieda; van de Kerkhove, Jeroen; Babin, Sergey
Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101451Q-101451Q-1, 913061p
Conference
Wallow, Thomas I.; Dai, Junyan; Szmanda, Charles R.; Cervera, Hiram; Truong, Chi; Bekiaris, Nikolaos; Kye, Jong-Wook; Kim, Ryoung-Han; Levinson, Harry J.; Mori, Glen
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72730D-72730D-10, 10p
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Conference
Wallow, Thomas I.; Pierson, Bill; Mizuno, Hiroyuki; Fumar-Pici, Anita; Petrillo, Karen; Anderson, Chris N.; Naulleau, Patrick P.; Hansen, Steven G.; Deng, Yunfei; van Ingen Schenau, Koen; Koay, Chiew-Seng; Ohara, Linda; Han, Sang-In; Watso, Robert; Huli, Lior; Burkhardt, Martin; Wood, Obert; Mallmann, Joerg; Kessels, Bart; Routh, Robert
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Correlation of experimental and simulated cure-induced photoresist distortions in double patterning.
Conference
Wallow, Thomas I.; Rayasam, Mahidhar; Yamaguchi, Masanori; Yamada, Yohei; Petrillo, Karen; Yoshimoto, Kenji; Kye, Jongwook; Kim, Ryoung-Han; Levinson, Harry J.
Proceedings of SPIE; Nov2009, Issue 1, p727309-727309-8, 8p
Conference
Wallow, Thomas I.; Kim, Ryoung-han; LaFontaine, Bruno; Naulleau, Patrick P.; Anderson, Chris N.; Sandberg, Richard L.
Proceedings of SPIE; Nov2007, Issue 1, p653317-653317-9, 9p
Conference
Morales, Alfredo M.; Simmons, Blake A.; Wallow, Thomas I.; Campbell, K. Jeffery; Mani, Seethambal S.; Mittal, Brita; Crocker, Robert W.; Cummings, Eric B.; Davalos, Rafael V.; Domeier, Linda A.; Hunter, Marion C.; Krafcik, Karen L.; McGraw, Gregory J.; Mosier, Bruce P.; Sickafoose, Shane M.
Proceedings of SPIE; Nov2006, Issue 1, p610901-610901-11, 11p
Conference
Sooriyakumaran, Ratnam; Davis, Blake W.; Larson, Carl E.; Brock, Phillip J.; DiPietro, Richard A.; Wallow, Thomas I.; Connor, Eric F.; Sundberg, Linda K.; Breyta, Gregory; Allen, Robert D.; Patel, Kaushal S.; Varanasi, Pushkara Rao
Proceedings of SPIE; Nov2004, Issue 1, p71-78, 8p
Conference
Allen, Robert D.; Opitz, Juliann; Ito, Hiroshi; Wallow, Thomas I.; Casmier, Daniel V.; DiPietro, Richard A.; Brock, Philip; Breyta, Greg; Sooriyakumaran, Ratnam; Larson, Carl E.; Hofer, Donald C.; Rao Varanasi, P.; Mewherter, Ann Marie; Jayaraman, Saikumar; Vicari, Richard
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 1999, 3678(I):66-77)
Conference
Proceedings of SPIE; Nov2002, Issue 1, p299-312, 14p
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[AR] Wallow, Thomas I.
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