학술논문

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(예 : 2010-2015)
'학술논문' 에서 검색결과 8건 | 목록 1~10
Academic Journal
Plasma Chemistry & Plasma Processing; Jan2016, Vol. 36 Issue 1, p121-149, 29p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10958)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advanced Etch Technology for Nanopatterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8685:ix)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advanced Etch Technology for Nanopatterning. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8328:ix-x)
Conference
2011 Abstracts IEEE International Conference on Plasma Science (ICOPS); 2011, p1-1, 1p
Conference
In: Electrochemical Society Extended Abstracts. (Electrochemical Society Extended Abstracts, 1984, 84-1:65)
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제한된 항목
[AR] Oehrlein, G.
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