학술논문
'학술논문'
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Academic Journal
In Applied Surface Science 2006 252(19):7186-7189
Academic Journal
Journal of Physics. D, Applied Physics; 50; 3; Other Information: CHORUS Timestamp: 2016-12-14 02:07:42
Academic Journal
Plasma Chemistry & Plasma Processing; Jan2016, Vol. 36 Issue 1, p121-149, 29p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10958)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology for Nanopatterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8685:ix)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology for Nanopatterning. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8328:ix-x)
Conference
2011 Abstracts IEEE International Conference on Plasma Science (ICOPS); 2011, p1-1, 1p
Conference
In: Electrochemical Society Extended Abstracts . (Electrochemical Society Extended Abstracts, 1984, 84-1:65)
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[AR] Oehrlein, G.
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