학술논문

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발행년	- (예 : 2010-2015)

Comparing PVD Titanium Nitride Film Properties and their Effect on Beyond 7 nm EUV Patterning

Conference

DeVries, Scott; De Silva, Ekmini Anuja; Canaperi, Donald; Simon, Andrew; de la Pena, Abraham Arceo; Wang, Wei; Maniscalco, Joseph; Meli, Luciana; Mendoza, Brock

2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020 31st Annual. :1-5 Aug, 2020

Full Text (IEEE) Find it@PNU

High-throughput, nondestructive assessment of defects in patterned epitaxial films on silicon by machine learning-enabled broadband plasma optical measurements

Conference

Matham, Shravan; Durfee, Curtis; Mendoza, Brock; Sadana, Devendra K; Bedell, Stephen W; Gaudiello, John; Teehan, Sean; Choi, HeungSoo; Jain, Ankit; Plihal, Martin

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2019 30th Annual SEMI. :1-4 May, 2019

Full Text (IEEE) Find it@PNU

Study of titanium nitride underlayer properties and its influence on tungsten growth

Conference

Pancharatnam, Shanti; Wynne, Jean; Karve, Gauri; Carr, Adra V.; Mendoza, Brock; White, Lisamarie; Rodriguez, Gabriel; Vries, Scott De; Wang, Wei

2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :395-398 Apr, 2018

Full Text (IEEE) Find it@PNU