학술논문
'학술논문'
에서 검색결과 64건 | 목록
1~10
Conference
Wang, Youcheng; Chen, Zhuo; Wang, Cong; Keller, Nick; Antonelli, G. Andrew; Liu, Zhuan; Ribaudo, Troy; Grynko, Rostislav
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-8 May, 2023
Academic Journal
Wang, Youcheng; Chen, Zhuo; Wang, Cong; Keller, Nick; Andrew Antonelli, G.; Liu, Zhuan; Ribaudo, Troy; Grynko, Rostislav
Conference
Dixit, Dhairya; Dey, Sonal; Kagalwala, Taher; Timoney, Padraig; Ramnath, Yudesh; Elia, Alexander; Paranjape, Ninad; Keller, Nick; Vaid, Alok
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2019 30th Annual SEMI. :1-7 May, 2019
Academic Journal
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Dec2022, Vol. 40 Issue 6, p1-7, 7p
Periodical
Robinson, John C.; Sendelbach, Matthew J.; Keller, Nick; Chen, Zhuo; Wang, Peter; Grynko, Rostislav; Ribaudo, Troy; Antonelli, G. Andrew; Wang, Youcheng; Frederick, Joshua; Takabayashi, Sadao; Hauck, John; Engelhard, Dan
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124961Z-124961Z-13, 12371153p
Periodical
Robinson, John C.; Sendelbach, Matthew J.; Keller, Nick; Ming, Wenmei; Chen, Zhuo; Antonelli, G. Andrew; Ribaudo, Troy; Liu, Zhuan; Takabayashi, Sadao; Hauck, John; Frederick, Joshua; Engelhard, Dan
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530T-120530T-9, 1084780p
Academic Journal
Non-destructive measurement of bottom width in deep trench isolation structures using IRCD metrology
Periodical
Sendelbach, Matthew J.; Schuch, Nivea G.; Keller, Nick; Poulingue, Marc; Grynko, Ross; Ribaudo, Troy; Antonelli, G. Andrew; Li, Victor; Ravasio, Marcello; Le Cunff, Delphine
Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p1295514-1295514-13
Academic Journal
Korde, Madhulika; Kal, Subhadeep; Alix, Cheryl; Keller, Nick; Antonelli, G. Andrew; Mosden, Aelan; Diebold, Alain C.
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2020, Vol. 38 Issue 2, p1-13, 13p
Conference
Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-12, 12p
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제한된 항목
[AR] Keller, Nick
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