학술논문
'학술논문'
에서 검색결과 38건 | 목록
1~10
Academic Journal
Tomori, H.; Dinh, C.Q.; Kawakami, S.; Kuwahara, Y.; Okada, S.; Cho, K.; Nakamura, J.; Yamasaki, S.; Terada, S.; Muramatsu, M.; Nagahara, S.; Kato, K.; Krawicz, A.; McInerney, K.; Antonovich, N.; Huli, L.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2024, 37(3):245-250)
Academic Journal
Dinh, C.Q.; Kuwahara, Y.; Dauendorffer, A.; Yoshida, K.; Okada, S.; Onitsuka, T.; Kawakami, S.; Shimura, S.; Muramatsu, M.; Yoshihara, K.; Nagahara, S.; Petersen, J.S.; De Simone, D.; Foubert, P.; Vandenberghe, G.; Huli, L.; Grzeskowiak, S.; Krawicz, A.; Bae, N.; Kato, K.; Nafus, K.; Raley, A.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2022, 35(1):87-93)
Conference
Dinh, C.Q.; Cho, K.; Tomori, H.; Kuwahara, Y.; Onitsuka, T.; Okada, S.; Kawakami, S.; Hara, A.; Fujimoto, S.; Muramatsu, M.; Nagahara, S.; Tsuzuki, R.; Liu, X.; Thiam, A.; Feurprier, Y.; Nafus, K.; Carcasi, M.; Huli, L.; Kato, K.; Krawicz, A.; Kocsis, M.; De Schepper, P.; McQuade, L.; Kasahara, K.; Garcia Santaclara, J.; Hoefnagels, R.; La Fontaine, B.; Miyakawa, R.; Anderson, C.; Naulleau, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XLI. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12957)
Conference
Cho, K.; Tomori, H.; Dinh, C.Q.; Hara, A.; Fujimoto, S.; Dauendorffer, A.; Muramatsu, M.; Nagahara, S.; Huli, L.; Kato, K.; Antonovich, N.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XLI. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12957)
Academic Journal
Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 January 2019, 18(1))
Conference
Que Dinh, C.; Kawakami, S.; Kuwahara, Y.; Okada, S.; Cho, K.; Tomori, H.; Nakamura, J.; Terada, S.; Muramatsu, M.; Nagahara, S.; Kato, K.; Krawicz, A.; McInerney, K.; Antonovich, N.; Huli, L.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
Kato, K.; Huli, L.; Antonovich, N.; Hetzer, D.; Grzeskowiak, S.; Liu, E.; Ko, A.; Shimura, S.; Kawakami, S.; Kitano, T.; Nagahara, S.; Meli, L.; Seshadri, I.; Burkhardt, M.; Petrillo, K.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Conference
Huli, L.; Kato, K.; Gueci, S.; Antonovich, N.; Grzeskowiak, S.; Hetzer, D.; Liu, E.; Krawicz, A.; Shimura, S.; Kawakami, S.; Okada, S.; Petrillo, K.; Meli, L.; Latham, N.; Cabrera, Y.; Antonovich, B.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Conference
Dinh, C.Q.; Kuwahara, Y.; Dauendorffer, A.; Okada, S.; Fujimoto, S.; Kawakami, S.; Shimura, S.; Muramatsu, M.; Cho, K.; Nagahara, S.; Liu, X.; Nafus, K.; Carcasi, M.; Agarwal, A.; Somervell, M.; Huli, L.; Kato, K.; Kocsis, M.; De Schepper, P.; Meyers, S.; McQuade, L.; Kasahara, K.; Garcia Santaclara, J.; Hoefnagels, R.; Anderson, C.; Naulleau, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Conference
Kuwahara, Y.; Kawakami, S.; Okada, S.; Kamei, Y.; Onitsuka, T.; Yamauchi, T.; Miyahara, N.; Dinh, C.; Shimura, S.; Kato, K.; Huli, L.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
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[AR] Huli, L.
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