학술논문
'학술논문'
에서 검색결과 204건 | 목록
1~10
Academic Journal
Kong, LayWai; Rudack, Andrew C.; Krueger, Peter; Zschech, Ehrenfried; Arkalgud, Sitaram; Diebold, A.C.
In Microelectronic Engineering April 2012 92:24-28
Academic Journal
In Thin Solid Films 28 February 2011 519(9):2929-2932
Academic Journal
Liehr, M.; Hazra, J.; Beckmann, K.; Mukundan, V.; Diebold, A.C.; Cady, N.; Alexandrou, I.; Yeow, T.; Race, J.; Tapily, K.; Consiglio, S.; Kurinec, S.K.
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, January 2023, 41(1))
Conference
Pasikatan, E.; Diebold, A.C.; Andrew Antonelli, G.; Keller, N.; Kal, S.; Rednor, M.; Kuhn, M.; Murakami, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Academic Journal
Mukundan, V.; Hazra, J.; Cady, N.; Diebold, A.C.; Consiglio, S.; Triyoso, D.H.; Tapily, K.; Clark, R.D.; Leusink, G.J.; McBriarty, M.E.; Schujman, S.; Beckmann, K.; Kaushik, V.
In: Physica Status Solidi (A) Applications and Materials Science . (Physica Status Solidi (A) Applications and Materials Science, May 2021, 218(10))
Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5 Zr0.5 O2 films
Academic Journal
Mukundan, V.; Schujman, S.; Diebold, A.C.; Consiglio, S.; Triyoso, D.H.; Tapily, K.; Clark, R.D.; Leusink, G.J.; Mart, C.; Kämpfe, T.; Weinreich, W.; Jordan-Sweet, J.
In: Applied Physics Letters . (Applied Physics Letters, 28 December 2020, 117(26))
Conference
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop Semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995. :50-60 1995
Academic Journal
In: Journal of Applied Physics . (Journal of Applied Physics, 28 October 2020, 128(16))
Academic Journal
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 March 2020, 38(2))
Academic Journal
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 16(3):409-416 Aug, 2003
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[AR] Diebold, A.C.
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