학술논문
'학술논문'
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1~10
Rapid prototyping of etch test structures for hard mask development using electron beam lithography.
Academic Journal
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2024, Vol. 42 Issue 1, p1-12, 12p
Academic Journal
Hung, Albert M.; Micheel, Christine M.; Bozano, Luisa D.; Osterbur, Lucas W.; Wallraff, Greg M.; Cha, Jennifer N.
Academic Journal
Kershner, Ryan J.; Bozano, Luisa D.; Micheel, Christine M.; Hung, Albert M.; Fornof, Ann R.; Cha, Jennifer N.; Rettner, Charles T.; Bersani, Marco; Frommer, Jane; Rothemund, Paul W. K.; Wallraff, Gregory M.
Academic Journal
Bozano, Luisa D.; Carter, Kenneth R.; Lee, Victor Y.; Miller, Robert D.; DiPietro, Richard; Scott, J. Campbell
Academic Journal
Razza, Nicolò; Blanchet, Bastien; Lamberti, Andrea; Pirri, Fabrizio C.; Tulliani, Jean‐Marc; Bozano, Luisa D.; Sangermano, Marco
Academic Journal
Vigna, Lorenzo; Fasoli, Andrea; Cocuzza, Matteo; Pirri, Fabrizio C.; Bozano, Luisa D.; Sangermano, Marco
Periodical
Wallow, Thomas I.; Hohle, Christoph K.; Sundberg, Linda K.; Wallraff, Gregory M.; Bozano, Luisa D.; Truong, Hoa D.; Sanchez, Martha I.; Goldfarb, Dario L.; Petrillo, Karen E.; Hinsberg, William D.
Proceedings of SPIE; March 2014, Vol. 9051 Issue: 1 p90510S-90510S-9, 814600p
Periodical
Bozano, Luisa D.; Sooriyakumaran, Ratnam; Sundberg, Linda K.; Sanchez, Martha I.; Lofano, Elizabeth M.; Rettner, Charles T.; Nagasawa, Takayuki; Watanabe, Satoshi; Kawai, Yoshio; Palavesam, Nagarajan; Gandara Montano, Gustavo
Proceedings of SPIE; March 2012, Vol. 8325 Issue: 1 p83250X-83250X-8, 749259p
Periodical
Wakamatsu, Goji; Goto, Kentaro; Hishiro, Yoshi; Furukawa, Taiichi; Murakami, Satoru; Motonari, Masayuki; Yamaguchi, Yoshikazu; Shimokawa, Tsutomu; Breyta, Greg; DeSilva, Anuja; Arellano, Noel; Bozano, Luisa D.; Larson, Carl E.; Glodde, Martin; Sooriyakumaran, Ratnam
Proceedings of SPIE; March 2012, Vol. 8325 Issue: 1 p83250T-83250T-9, 749260p
Academic Journal
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제한된 항목
[AR] Bozano, Luisa D.
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