학술논문
System and method for electronically collecting data in a fabrication facility
Document Type
Patent
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Abstract
The present invention is a system for electronically collecting data in a process line in a semiconductor or data storage fabrication facility. The system includes a data collection processing unit configured to sniff data packets transmitted over a LAN between a plurality of tools in the fabrication facility. The data collection processing unit is further configured to determine if the sniffed data packets are valid data packets based on a configuration file established for the plurality of tools. The data collection processing unit is further configured to parse one or more data fragments from the valid data packets.