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Low resistivity indium tin oxide films deposited by unbalanced DC magnetron sputtering

Document Type

Article

Author

Shin, S.H; Shin, J.H; Park, K.J; Ishida, T; Tabata, O; Kim, H.H

Source

In Thin Solid Films 1999 341(1):225-229

Subject

Language

ISSN

0040-6090

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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