학술논문
IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes
Document Type
Conference Paper
Author
Source
In: IEEE 2012 International Semiconductor Conference Dresden-Grenoble, ISCDG 2012 , IEEE 2012 International Semiconductor Conference Dresden-Grenoble, ISCDG 2012. (IEEE 2012 International Semiconductor Conference Dresden-Grenoble, ISCDG 2012, 2012, :165-167)
Subject
Language
English