학술논문
Fourier-transformed infrared absorption spectroscopy: A tool to characterize the chemical composition of Ar-NH3 -SiH4 dielectric barrier discharge
Document Type
Article
Author
Source
In: Journal of Physics D: Applied Physics . (Journal of Physics D: Applied Physics, 20 November 2013, 46(46))
Subject
Language
English
ISSN
00223727
13616463
13616463