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Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers

Document Type

Article

Author

Watanabe, S.; Kurioka, T.; Chen, C.-Y.; Chang, T.-F.M.; Onishi, A.; Chakraborty, P.; Machida, K.; Ito, H.; Sone, M.; Miyake, Y.

Source

In: Micro and Nano Engineering. (Micro and Nano Engineering, June 2024, 23)

Subject

Language

English

ISSN

25900072

Online Access

Full Text (ScienceDirect 종량제) Full Text (ScienceDirect O/A) JCR 저널정보 Scopus Find it@PNU

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