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Depth profiling of high-energy hydrogen-implanted 6H-SiC

Document Type

Article

Author

Brink, D.J.; Maurice, T.; Kunert, H.; Blanque, S.; Camassel, J.; Pascual, J.

Source

In: Applied Optics. (Applied Optics, 20 February 2004, 43(6):1275-1280)

Subject

Language

English

ISSN

15394522
1559128X

Online Access

Full Text (OSA) Web of Science JCR 저널정보 Scopus Find it@PNU

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