학술논문
Qualification of design-optimized multi-zone hotplate for 45nm node mask making
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6607(PART 1))
Subject
Language
English
ISSN
0277786X