학술논문
Study of atomic layer deposited gadolinium oxide thin films on silicon
Document Type
Conference Paper
Author
Source
In: Materials Research Society Symposium Proceedings , Materials Research Society Symposium Proceedings - Characterization of Oxide/Semiconductor Interfaces for CMOS Technologies. (Materials Research Society Symposium Proceedings, 2007, 996:133-138)
Subject
Language
English
ISSN
02729172