부산대학교 도서관

The piezoresistive response of thermal is presented in this paper. One of the prime application is the measurement of acceleration for magnitude of a couple of thousand G. The thermal accelerometer is composed of one heater resistor and two detectors. By thermoresistive effect the detectors measure a difference of temperature proportional to the acceleration. Nevertheless, for these values of acceleration, simulations show a large displacement of these resistors. The consequences of this deformation is variation of resistance by piezoresistive effect. These variations create errors of measurements. Nanoindentation experiments allow to estimate the average gauge factor, k=2,65, for our samples. Finite element analysis has been performed, in order to estimate the deflection in function of the acceleration for different values of shock amplitude. Finally, the piezoresistive contribution is three orders less of magnitude than the difference of temperature between the two detectors.