부산대학교 도서관

This paper reports a novel low-temperature atmospheric micro-plasma jet device with hollow-cone electrodes. The device consists of a PDMS layer with a convex cone covered with a copper (Cu) electrode, and a silicon chip with a cone-shaped hole covered with an aluminum (Al) layer as a counterpart electrode. The PDMS and the silicon are bonded by PET tapes, with the convex cone on the PDMS positioned in the middle of the hole in the silicon chip. Stimulating voltages are applied between the Cu electrode and the Al electrode to create discharges in the gap between the two electrodes, generating plasma that is blown out by gas flow to form a plasma jet. The device can generate a 100µm diameter plasma jet with hollow-cone electrodes, and the peak-to-peak amplitude of the stimulating voltage is about 820V. The small diameter of the plasma jet allows precision control for cell treatment.