학술논문
Planar array technology for the fabrication of germanium X-ray microcalorimeters
Document Type
Conference
Author
Source
2008 IEEE Nuclear Science Symposium Conference Record Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE. :1789-1792 Oct, 2008
Subject
Language
ISSN
1082-3654
Abstract
Several technologies are presently competing for measuring the temperature increase in cryogenic micro-calorimeters used as high resolution energy-dispersive X-ray detectors. Doped germanium, whose resistivity depends on temperature, is a promising material for this purpose, because of its comparatively low specific heat and the possibility of making wafers with high doping uniformity by neutron transmutation. Presently, Ge-based microcalorimeters are still micro-machined and manually assembled. Here we present a planar approach to the fabrication of 2-D arrays of microcalorimeters and show the preliminary technological results.