학술논문

Broadband and Temperature Tolerant Silicon Nitride Liquid Controlled Waveguide Coupler
Document Type
Periodical
Source
Journal of Lightwave Technology J. Lightwave Technol. Lightwave Technology, Journal of. 37(10):2311-2316 May, 2019
Subject
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Optical waveguides
Liquids
Liquid waveguides
Optical switches
Silicon compounds
Optical device fabrication
Refractive index
Couplers
integrated optics
liquids
optical fiber communication
optical switches
silicon nitride
silicon photonics
Language
ISSN
0733-8724
1558-2213
Abstract
A broadband and temperature tolerant liquid-controlled adiabatic waveguide coupler (LCC) is realized. The LCC with silicon nitride waveguides is designed to be compatible with liquids that can be actuated by an electrowetting-on-dielectric system. This proof-of-principle demonstration with manual actuation paves the way toward the realization of non-voloptical switch systems. A 630-${\mu }$m-long LCC configured as a $1\times 2$ switch has a measured insertion loss less than 1.5 dB and a crosstalk less than $-14$ dB for both bar and cross state over the telecommunication wavelength range 1260 to 1630 nm. Furthermore, the LCC is tolerant to variations in temperature. The measured excess insertion loss over the temperature range 21 to 73 $^\circ$C is less than 0.3 dB for bar and cross state, over the same wavelength range.