부산대학교 도서관

Scanning Thermal Microscopy (SThM) has become an important measurement tool for characterizing the thermal properties of materials at the nanometer scale. This technique requires a SThM probe that combines an Atomic Force Microscopy (AFM) probe and a very sensitive resistive thermometry; the thermometer being located at the apex of the probe tip allows the mapping of temperature or thermal properties of nanostructured materials with very high spatial resolution. The high interest of the SThM technique in the field of thermal nanoscience currently suffers from a low temperature sensitivity despite its high spatial resolution. To address this challenge, we developed a high vacuum-based AFM system hosting a highly sensitive niobium nitride (NbN) SThM probe to demonstrate its unique performance. As a proof of concept, we utilized this custom-built system to carry out thermal measurements using the 3$\omega$ method. By measuring the $V_{3\omega}$ voltage on the NbN resistive thermometer in vacuum conditions we were able to determine the SThM probe's thermal conductance and thermal time constant. The performance of the probe is demonstrated by doing thermal measurements in-contact with a sapphire sample.
Comment: 17 pages, 13 figures