학술논문

Conformal coating of macroscopic nanoparticle compacts with ZnO via atomic layer deposition.
Document Type
Article
Source
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan2024, Vol. 42 Issue 1, p1-11, 11p
Subject
ATOMIC layer deposition
CONFORMAL coatings
NANOPARTICLES
ELECTRICAL resistivity
SCANNING electron microscopy
Language
ISSN
07342101
Abstract
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