학술논문 – 법학도서관

학술논문

replay검색결과 돌아가기

search검색화면

Crack formation in strained SiGe grown on Ge-on-Si (111) and its suppression by patterning substrates

Document Type

Journal

Author

Wagatsuma, Youya; Alam, Md Mahfuz; Okada, Kazuya; Hoshi, Yusuke; Yamada, Michihiro; Hamaya, Kohei; Sawano, Kentarou

Source

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING; OCT 2020, 117 p105153 5p.

Subject

Language

English

ISSN

18734081

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

이메일