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COMPUTER-AIDED PROXIMITY CORRECTION FOR DIRECT WRITE E-BEAM LITHOGRAPHY

Document Type

Journal

Author

KNAPEK, E; KALUS, CK; MADORE, M; HINTERMAIER, M; HOFMANN, U; SCHERERWINNER, H; SCHLAGER, R

Source

MICROELECTRONIC ENGINEERING; MAR 1991, 13 1-4, p181-p184, 4p.

Subject

Language

English

ISSN

01679317

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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