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Fabrication of quantum emitters in aluminum nitride by Al-ion implantation and thermal annealing

Document Type

Journal

Author

Hernandez, E. Nieto; Yagci, H. B.; Pugliese, V.; Apra, P.; Cannon, J. K.; Bishop, S. G.; Hadden, J.; Tchernij, S. Ditalia; Olivero, P.; Bennett, A. J.; Forneris, J.

Source

APPLIED PHYSICS LETTERS; MAR 18 2024, 124 12, p124003 9p.

Subject

Language

English

ISSN

10773118

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

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