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Two-axis single-crystal silicon micromirror arrays

Document Type

Journal

Author

Dokmeci, MR; Pareek, A; Bakshi, S; Waelti, M; Fung, CD; Heng, KH; Mastrangelo, CH

Source

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS; DEC 2004, 13 6, p1006-p1017, 12p.

Subject

Language

English

ISSN

10577157

Online Access

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

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