부산대학교 도서관

MEMS vibrating beam accelerometers use the variation of frequency of a vibrating beam attached to a proof mass to measure its applied acceleration. Considering inertial navigation applications, the beam is actuated in the linear regime to keep high eigen frequency stability. Concerning the new application of MEMS accelerometers as UGS seismometers, the bias stability is not important anymore and the important parameter is the resolution at integration time of 1 ms. It becomes then interesting to actuate the beam in the nonlinear regime. This paper presents a behavioral model of the vibrating beam accelerometer including the nonlinear terms. This model is validated by experimental measurements and phase noise in the nonlinear regime is simulated. The seismometer resolution is then calculated in the nonlinear regime and compared to other state of the art UGS seismometers.