학술논문
MEMS Microshutter Arrays for James Webb Space Telescope
Document Type
Report
Author
Li, Mary J; Beamesderfer, Michael; Babu, Sachi; Bajikar, Sateesh; Ewin, Audrey; Franz, Dave; Hess, Larry; Hu, Ron; Jhabvala, Murzy; Kelly, Dan; King, Todd; Kletetschkar, Gunther; Kutyrev, Alexander; Lynch, Barney; Moseley, Harvey; Mott, Brent; Oh, Lance; Rapchum, Dave; Ray, Chris; Sappington, Carol; Silverberg, Robert; Smith, Wayne; Snodgrass, Steve; Steptoe-Jackson, Rosalind; Valeriano
Source
Subject
Language
English
Abstract
MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instruments will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast, Arrays are close-packed silicon nitride membranes with a pixel size of 100x200 microns. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast, Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS technologies.