부산대학교 도서관

In this paper, a sliding mode control using a fractional-order operator (SMCFO) method is presented for the hysteresis of a piezoelectric (PZT) micro-nano platform. At first, the hysteresis of the PZT micro-nano platform is described using the Duhem model. With respect to the sliding mode controller design, we introduce a fractional-order operator into the design of the sliding mode surface and enhance the performance of the proposed controller. The nonlinear switching action of the controller is eliminated through a smooth control action by applying an uncertainty and disturbance estimation technique. The stability of the proposed controller is analyzed using the Lyapunov theorem. Simulations and experimental results demonstrate that the SMCFO method achieves a no-load high precision tracking control of the PZT micro-nano platform and is also robust against load perturbations of the platform