학술논문
Effect of Hydrogen on the Properties of BCN Films Prepared by Magnetron Sputtering / マグネトロンスパッタ法により作製したBCN膜特性に及ぼす水素の効果
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2019, :1431
Subject
Language
Japanese
ISSN
2436-7613