학술논문

Influence of deposition parameters on properties of laser ablated YBa2Cu3O(7-delta) films
Document Type
Academic Journal
Source
IEEE Transactions on Applied Superconductivity. March, 1993, Vol. 3 Issue 1, p1590, 4 p.
Subject
Copper oxide superconductors -- Research
Thin films -- Electric properties
Business
Electronics
Electronics and electrical industries
Language
ISSN
1051-8223
Abstract
An experiment on the effect of deposition conditions on the structural and superconducting characteristics of laser-ablated YBa2Cu3O(7-delta) films grown on LaAlO3, SrTiO3, MgO and ZrO2 substrates is presented. It interprets the observed morphological and superconducting properties of the films as a function of the substrate material, substrate temperature and oxygen pressure utilized during the fabrication process. It also reveals the films on LaAlO3 to be the best in terms of reproducibility and sensitivity to deposition parameters.