부산대학교 도서관

We have demonstrated resonant frequency tuning of nanowire resonator operated in both atmospheric circumstance and high vacuum environment using electrostatic spring-softening effect. The nanowire is synthesized at any desired position by focused ion beam-chemical vapor deposition (FIB-CVD) on the sidewall of batch-processed micro electrode. The resonant frequency in a vacuum chamber of 2.5 x [10.sup.-4] Pa is 1.564 MHz under the driving voltage of 5 [V.sub.DC] [+ or -] 5 [V.sub.AC]. When 30 [V.sub.DC] tuning bias is applied on tuning electrode, the resonant frequency is reduced to 1.529 MHz due to the electrostatic spring-softening effect while the driving bias is maintained. For the tuning bias of 60 V, the resonant frequency at atmospheric pressure has been tuned from 1.49 MHz to 1.41 MHz under the c riving voltage of 30 [V.sub.DC] [+ or -] 10 [V.sub.AC]. The method demonstrated both in high vacuum and at atmospheric pressure is a simple and effective way to tune the deviated resonant frequency of nanowire resonator to the desired value without the alteration of the structure or post fabrication process. Index Terms--Electrostatic force, electrostatic spring effect, focused ion beam-chemical vapor deposition (FIB-CVD), frequency tuning, nanowire resonator, resonant frequency.