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Materials for double patterning strategies: Development and application

Document Type

Article

Author

Perret, D.; Simon, J.; Gaugiran, S.; Cutler, C.; Cardolaccia, T.; Pikon, A.; Guerin, I.; Lapeyre, C.; Derrough, S.; Szmanda, C.; Trefonas, P.

Source

In Microelectronic Engineering 2009 86(4):757-760

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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