학술논문
Composition, structure, and magnetic properties of SiCxNyFez films produced by the PECVD method from a gas mixture of 1,1,1,3,3,3-hexamethyldisilazane, ferrocene, and helium
Document Type
Article
Author
Source
In Colloids and Surfaces A: Physicochemical and Engineering Aspects 20 December 2022 655
Subject
Language
ISSN
0927-7757