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Advanced activation of ultra-shallow junctions using flash-assisted RTP

Document Type

Article

Author

Lerch, W.; Paul, S.; Niess, J.; McCoy, S.; Selinger, T.; Gelpey, J.; Cristiano, F.; Severac, F.; Gavelle, M.; Boninelli, S.; Pichler, P.; Bolze, D.

Source

In Materials Science & Engineering B 2005 124:24-31

Subject

Language

ISSN

0921-5107

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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