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Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films

Document Type

Article

Author

Rubeck, S.; Cartailler, V.; Coutellier, V.; Imbert, G.; Gallois-Garreignot, S.; Meille, S.; Steyer, P.; Chevalier, J.

Source

In Microelectronic Engineering 15 August 2022 264

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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